Laser Induced Carbide Derived Carbon
(Atsushi HIRATA)
A highly lubricious carbon layer is formed locally on the silicon carbide surface by a laser beam, resulting in a surface with excellent microtribological properties. This technology is expected to be applied to the realization of micromachines that can be driven at high speeds and high temperatures.
![](http://www.surfeng.mech.e.titech.ac.jp/wp-content/uploads/2023/04/sicmodified_2x.jpg)
Friction properties of carbon film formed on SiC surface