Precision Polishing with Nano-Carbons

Precision Polishing with Nano-Carbons

（Atsushi HIRATA）

We are studying ultra-precision polishing methods using nano carbon materials (carbon onions and nano diamonds) as abrasive grains. Nanodiamonds, taking advantage of their hardness and size, show excellent polishing performance in terms of both polishing speed and surface roughness, but they have the disadvantage of leaving minute scratches on the surface. On the other hand, the carbon onion abrasive proposed in this laboratory demonstrates excellent abrasive performance even on hard silicon carbide, and is effective in suppressing the generation of minute scratches. We are also designing and manufacturing polishing equipment to make more effective use of the carbon onion abrasive.